Téléchargez le livre :  Dry Etching for Microelectronics
eBook Téléchargement ebook sans DRM
57,97

Téléchargement immédiat
Dès validation de votre commande
Ajouter à ma liste d'envies
Image Louise Reader présentation

Louise Reader

Lisez ce titre sur l'application Louise Reader.

Description
This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides the reader with more specialised information and references than found in a general review article. In addition, it presents a broad perspective which would otherwise have to be gained by reading a large number of individual research papers. An additional important and unique feature of this book is the inclusion of an extensive literature review of dry processing, compiled by search of computerized data bases. A subject index allows ready access to the key points raised in each of the chapters.
Pages
312 pages
Collection
n.c
Parution
2012-12-02
Marque
North Holland
EAN papier
9780444869050
EAN PDF SANS DRM
9780080983585

Prix
57,97 €

Suggestions personnalisées