Nanofabrication

Techniques and Principles

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Éditeur :

Springer


Paru le : 2011-11-08



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Description

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Pages
344 pages
Collection
n.c
Parution
2011-11-08
Marque
Springer
EAN papier
9783709104231
EAN EPUB
9783709104248

Informations sur l'ebook
Nombre pages copiables
3
Nombre pages imprimables
34
Taille du fichier
13855 Ko
Prix
147,69 €

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