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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

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Éditeur :

Springer


Collection :

SpringerBriefs in Applied Sciences and Technology

Paru le : 2018-10-05

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Description


This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.
Pages
115 pages
Collection
SpringerBriefs in Applied Sciences and Technology
Parution
2018-10-05
Marque
Springer
EAN papier
9789811325700
EAN PDF
9789811325717
Informations sur l'ebook
Nombre pages copiables
1
Nombre pages imprimables
11
Taille du fichier
5827 Ko
Prix
52,74 €
EAN EPUB
9789811325717
Informations sur l'ebook
Nombre pages copiables
1
Nombre pages imprimables
11
Taille du fichier
2970 Ko
Prix
52,74 €

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