Téléchargez le livre : Metal Impurities in Silicon- and Germanium-Based Technologies

Metal Impurities in Silicon- and Germanium-Based Technologies

Origin, Characterization, Control, and Device Impact de

,

Éditeur :

Springer


Collection :

Springer Series in Materials Science

Paru le : 2018-08-13

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Description

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed.
 
The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Pages
438 pages
Collection
Springer Series in Materials Science
Parution
2018-08-13
Marque
Springer
EAN papier
9783319939247
EAN PDF
9783319939254
Informations sur l'ebook
Nombre pages copiables
4
Nombre pages imprimables
43
Taille du fichier
14541 Ko
Prix
168,79 €
EAN EPUB
9783319939254
Informations sur l'ebook
Nombre pages copiables
4
Nombre pages imprimables
43
Taille du fichier
8817 Ko
Prix
168,79 €

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