Mechanics of Microsystems

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Éditeur :

Wiley


Collection :

The Wiley Microsystem and Nanotechnology Series

Paru le : 2017-11-20

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Description

Mechanics of Microsystems
Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy
 
A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability
 
Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry.
Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.
 
 
Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material.
 
 
The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
Pages
432 pages
Collection
The Wiley Microsystem and Nanotechnology Series
Parution
2017-11-20
Marque
Wiley
EAN papier
9781119053835
EAN PDF
9781119053804

Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
432
Taille du fichier
16067 Ko
Prix
128,66 €
EAN EPUB
9781119053811

Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
432
Taille du fichier
26030 Ko
Prix
128,66 €