Téléchargez le livre : A Practical Guide to Optical Metrology for Thin Films

A Practical Guide to Optical Metrology for Thin Films



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Éditeur :

Wiley-VCH


Paru le : 2012-09-24



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Description

A one-stop, concise guide on determining and measuring thin film thickness by optical methods.
This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods.
Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon.
Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.
Pages
224 pages
Collection
n.c
Parution
2012-09-24
Marque
Wiley-VCH
EAN papier
9783527411672
EAN PDF
9783527664375
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
224
Taille du fichier
3574 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
89,62 €
EAN EPUB
9783527664351
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
224
Taille du fichier
3021 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
89,62 €

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