Téléchargez le livre : Plasma Etching Processes for Interconnect Realization in VLSI

Plasma Etching Processes for Interconnect Realization in VLSI



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Éditeur :

Iste Press - Elsevier


Paru le : 2015-04-14



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Description
This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.This book focuses on back end of line (BEOL) for high performance device realization and presents an overview of all etch challenges for interconnect realization as well as the current etch solutions proposed in the semiconductor industry. The choice of copper/low-k interconnect architecture is one of the keys for integrated circuit performance, process manufacturability and scalability. Today, implementation of porous low-k material is mandatory in order to minimize signal propagation delay in interconnections. In this context, the traditional plasma process issues (plasma-induced damage, dimension and profile control, selectivity) and new emerging challenges (residue formation, dielectric wiggling) are critical points of research in order to control the reliability and reduce defects in interconnects. These issues and potential solutions are illustrated by the authors through different process architectures available in the semiconductor industry (metallic or organic hard mask strategies). - Presents the difficulties encountered for interconnect realization in very large-scale integrated (VLSI) circuits - Focused on plasma-dielectric surface interaction - Helps you further reduce the dielectric constant for the future technological nodes
Pages
128 pages
Collection
n.c
Parution
2015-04-14
Marque
Iste Press - Elsevier
EAN papier
9781785480157
EAN PDF
9780081005903
Informations sur l'ebook
Nombre pages copiables
12
Nombre pages imprimables
12
Taille du fichier
8212 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
90,68 €
EAN EPUB SANS DRM
9780081005903
Informations sur l'ebook
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
90,68 €

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