Téléchargez le livre : Micro Mechanical Systems

Micro Mechanical Systems

Principles and Technology

de

,

Éditeur :

Elsevier Science


Paru le : 1998-07-24



eBook Téléchargement , DRM LCP 🛈 DRM Adobe 🛈 ebook sans DRM
237,38 €
Téléchargement immédiat
Dès validation de votre commande
Ajouter à ma liste d'envies
Image Louise Reader présentation

Louise Reader

Lisez ce titre sur l'application Louise Reader.

badge apple Application Louise Reader
badge Android Application Louise Reader
Description
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Pages
276 pages
Collection
n.c
Parution
1998-07-24
Marque
Elsevier Science
EAN papier
9780444823632
EAN PDF
9780080536545
Informations sur l'ebook
Nombre pages copiables
27
Nombre pages imprimables
27
Taille du fichier
14100 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
237,38 €
EAN EPUB SANS DRM
9780080536545
Informations sur l'ebook
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
237,38 €

Suggestions personnalisées