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Chemistry in Microelectronics
Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in "Front End Of the Line" which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications.
Pages
384 pages
Collection
n.c
Parution
2013-02-28
Marque
Wiley-ISTE
EAN papier
9781848214361
EAN PDF
9781118580141

Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
384
Taille du fichier
10936 Ko
Prix
163,47 €
EAN EPUB
9781118578124

Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
384
Taille du fichier
3594 Ko
Prix
163,47 €

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