Micro Electromechanical Systems (MEMS)

Practical Lab Manual de

Éditeur :

Wiley-IEEE Press


Collection :

IEEE Press Series on Sensors

Paru le : 2025-02-06

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Description

Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices
Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.
The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.
The book covers additional topics such as: Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generationSimulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printingX-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field
A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.
Pages
208 pages
Collection
IEEE Press Series on Sensors
Parution
2025-02-06
Marque
Wiley-IEEE Press
EAN papier
9781394229833
EAN PDF
9781394229857

Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
208
Taille du fichier
7803 Ko
Prix
106,34 €
EAN EPUB
9781394229840

Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
208
Taille du fichier
6052 Ko
Prix
106,34 €