Téléchargez le livre : Photomodulated Optical Reflectance

Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

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Éditeur :

Springer


Collection :

Springer Theses

Paru le : 2012-06-26



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Description
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.
Pages
204 pages
Collection
Springer Theses
Parution
2012-06-26
Marque
Springer
EAN papier
9783642301070
EAN EPUB
9783642301087
Informations sur l'ebook
Nombre pages copiables
2
Nombre pages imprimables
20
Taille du fichier
3717 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
94,94 €

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